Strasbaugh Installation
Version 4.0 - February 1998; Update 11/06/01 2 - 7 U
The machine requires a minimum of FOUR FEET of CLEARANCE
around all sides for service access.
The necessary connections for electrical, plumbing, and exhaust utilities are
all accessible from the rear of the machine. Instructions for utilities hookup
are below in the Connecting Utilities section.
While moving the machine to its final site location, please be sure to observe
the forklift handling procedures defined above.
STEP 4 - LEVELING
LEVELING REQUIREMENT
The Model 6DS-SP Planarizer must be level for proper operation.
Using the polish table surface as a reference plane, level the machine to within
0.010 inches per foot.
Leveling the polish table will optimize the machine position for even distribution
of slurry solution on the polish table surface.
LEVELING FEET
The machine has six leveling feet, three each along the lengths of the front and
back base frame channels.
The leveling feet can be raised or lowered by turning the hex head adjustment
bolt above each foot after loosening the locking nut.
Each leveling foot should be individually adjusted such that together they contact
the floor with the machine’s weight evenly distributed over all six feet.
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