Maintenance Model 6DS-SP Planarizer
2 - 18 U Version 4.0 - February 1998; Update 11/06/01
The interface connection for the exhaust failure alarm system is located on the
bottom of the large electrical cabinet on the rear of the machine.
• If available, install the Exhaust Failure Monitoring system by connecting the
Exhaust Failure cable to the appropriate 4-pin AMP receptacle on the
bottom of the large electrical cabinet
TEMPERATURE-CONTROLLED WATER
The coolant in (18) and coolant out (17) permit the cycling of temperature-
controlled water through the polish table for a temperature-controlled
polishing process. Both connections require mating to the machine’s 3/4-
inch PVC threaded pipe joints. The pressure regulator adjusts the pressure of
the liquid flowing through the loop. The coolant in (18) and coolant out
(17) must be connected to the temperature control unit.
A bypass valve, coolant bypass (19), mounted at the rear of the machine,
provides overpressure protection for the polish table. If coolant back
pressure rises above 10 PSI, the coolant bypass valve opens and dumps to
the table drain (12) to prevent damage to the table.
TEMPERATURE CONTROL UNIT
• Manufacturer’s
Data
Neslab HX-150 Temperature Control Unit
OR
M&W Temperature Control Unit
For connection of utilities to the temperature control unit, refer to the Neslab
or M&W documentation in the Manufacturers’ Data section of the
Appendices of the 6DS-SP Maintenance manual.
EMO Circuit for Temperature Control Unit: An emergency off unit for
the temperature control unit is available as an accessory (SA236117). It is
mounted in a separate enclosure providing "EMO" and "Machine On"
buttons, "Power On" and "Machine On" lights, and a main disconnect. Refer
to engineering drawings 236117A1 and 236117E1.
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