Maintenance Model 6DS-SP Planarizer
2 - 20 U Version 4.0 - February 1998; Update 11/06/01
STEP 7 - SLURRY SYSTEM
CONNECTION
Related Engineering Drawings
• 217946F1
Water and Vacuum Diagram
• 217946F4
Slurry Systems
• 117770A1
Slurry Tanks Rear View
• 2179465EN
Third Peristaltic Pump
The Model 6DS-SP Planarizer incorporates two integral slurry systems. A third
slurry pump is available as an option. Refer to the engineering drawings listed
above and Figure 2-1 of the previous section, for the following discussion.
Each system consists of a mobile slurry cart and an air operated diaphragm
pump. Each slurry cart has three connections via quick-disconnect couplings on
the cart cover. The opposite ends of these lines terminate to the diaphragm
pumps and the slurry system valve plumbing for each system. The slurry system
valve assemblies, located on the outboard side of the left side electrical cabinet
enclosure, are labeled slurry 1 and slurry 2. The other connections, leading to
the diaphragm pumps, are identified in Figure 2-1 as slurry 1 supply (6) and
slurry 2 supply (7). The two slurry systems are identical in plumbing and
operation. Engineering drawing 217946F1 shows the layout and terminations of
the slurry lines.
(Note that the supply connection for the optional third pump, a peristaltic pump,
is located inside the upper rear service door.)
All three slurry cart connections must be connected correctly for the slurry
systems to operate as designed. The three connections are designated as slurry
supply, slurry main return, and slurry filter return. The slurry supply lines (6
and 7 of Figure 2-1) supply the slurry to the inlet of the diaphragm pump which
pumps slurry through the machine plumbing. The slurry main return provides
the return path for the slurry as it recirculates while permitting agitation of slurry
in the tank. The slurry filter return is a low flow recirculating path through
which the slurry is filtered to remove solids and contaminants.
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