Strasbaugh Installation
Version 4.0 - February 1998; Update 11/06/01 2 - 23 U
The items shown in Table 2-3 are also listed in the Calibration Report section of
the Strasbaugh, Installation Report.
For information on the procedures listed in Table 2-2, refer to the Software
Calibration chapter of the 6DS-SP Maintenance manual and the Calibration
Variables Listing, found in the Appendices of the same manual.
Table 2-3 Calibration Report Items
Calibration Items
Cooling Water Flow
Cooling Water Temperature In
Cooling Water Temperature Out
Left/Right Spindle Force
Left/Right Spindle Speed
Pad Conditioning Arm Speed
Pad Conditioning Downforce
Second Table Speed (if installed)
Slurry 1, Slurry 2 pH
Slurry 1, Slurry 2, Pump 3 (if installed) Flow
Table Speed
Table Temperature
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