Strasbaugh 6DS-SP - Page 418

Maintenance Model 6DS-SP Planarizer
2 - 22 U Version 4.0 - February 1998; Update 11/06/01
STEP 8 - COMPLETING THE
INSTALLATION - INITIAL
ADJUSTMENTS
After following Steps 1. through 7., above, for unpacking, placing, leveling the
machine, and connecting utilities and slurry (and in the process completing the
Facility and Equipment Preparation Sign-off Sheet checklist), complete the
alignment and calibration procedures listed in Table 2-2 and Table 2-3, below.
The items shown in Table 2-2 are also listed on the Installation Status Check
Sheet of the R. Howard Strasbaugh, Inc., Installation Report.
Table 2-2 Installation Status Check Sheet Items
Procedure
6DS-SP Maintenance
Manual Chapter
Cleaning Station Alignments (single-table
machines only)
Chapter 9
Conditioning Arm Position Calibration
and related procedures
Chapter 10
Elevator Cassette Platform Leveling Chapter 9
Elevator Height Alignments Chapter 10
Load Station Alignments Chapter 9
Robot Arm Position Calibration Chapter 10
Robot Travel Position Calibration Chapter 10
Second Table Adjustments and related
procedures (two-table machines only)
Chapter 9
Shuttle Alignments Chapter 9
Spindle Alignments Chapter 9
Spindle Vacuum Chuck Alignments Chapter 9
Table Alignment Chapter 9