Strasbaugh Physical Description
Version 4.0 - February 1998 3 - 13
The Bridge Assembly (1) encloses the Left and Right Spindle Drive Assemblies
(2 and 3) and travels linearly left or right between the Load Stations (8 and 9) and
the Polish Table (12). In Figure
3-5, the bridge is shown positioned over the polish table.
The six defined positions for the bridge assembly are load, middle, polish, left
spindle curtain rinse (optional), right spindle curtain rinse (optional), second table
polish position (optional):
• At the load position the bridge aligns the left and right spindles to either
receive or deposit wafers at their respective Load Stations (8 and 9).
• The middle position is defined as the location at which the bridge assembly
rests between the load stations and the polish table, with the left spindle
drive assembly resting just to the right of the Right Side Load Station (9).
• The polish position is defined as the point at which the bridge assembly is
centered over the polish table.
• The left spindle curtain rinse position places the bridge assembly between
the load stations and the polish table with the left spindle at the optional
curtain rinse.
• The right spindle curtain rinse position places the bridge assembly between
the load stations and the polish table with the right spindle at the optional
curtain rinse.
• The second table polish position is the point at which the bridge assembly is
centered over the optional second polish table (if installed).
The Pad Conditioning Device Assembly (4) conditions the polish table pad by
applying downward force while sweeping a rotating conditioning device across the
polish table from its middle to its circumference or from its circumference to its
middle. After completing table conditioning, the assembly parks itself away from the
polish table, just outside the circumference on the right-hand side.
The Elevator Assembly (5) positions cassettes for the robot to remove wafers from
the send cassettes and replace in the receive cassettes. If installed, the optional
scrubber assembly is mounted at the right receive elevator position. (Refer to
engineering drawing 225245E1 for the scrubber interface electrical schematics),
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