Maintenance Model 6DS-SP Planarizer
3 - 14 Version 4.0 - February 1998
The Robot Assembly (6) transfers wafers from the send elevator cassettes to the load
stations and from the load stations to the receive elevator cassettes.
The Shuttle Assembly (7) travels forward and backward to position either the load
stations or cleaning stations under the spindles.
The Left and Right Load/Unload Stations (8 and 9) center wafers for placement
on the carriers and removal from the carriers.
The Left and Right Cleaning Stations (10 and 11) clean and rinse the
carriers/wafers to keep the inserts clean and free of slurry buildup. Note that recent
enhancements to the cleaning stations remove slurry, significantly reducing wafer
particle counts.
The optional second polish table assembly (not shown in Figure 3-5), is
installed at the shuttle. Note that the machine does not accommodate both a
second polish table and the cleaning stations.
The optional curtain rinse assembly (not shown in Figure 3-5) is installed
between the polish table and the load stations.
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