Maintenance Model 6DS-SP Planarizer
3 - 20 Version 4.0 - February 1998
MENUS
The section below lists the sixteen 6DS-SP menus together with references for
locating further information on each.
For detailed information on the 6DS-SP software user interface, refer to the
Operator Functions chapter of the 6DS-SP Operations manual.
Auto Polish Cycle Menu
Auto polish cycles are run at the Auto Polish Cycle Menu. For further
information on this menu, refer to the Operator Functions chapter of the 6DS-SP
Operations manual.
Slurry System Flush Menu
Slurry system flush is selected at this menu. For further information refer to the
Operator Functions and Machine Setup chapters of the
6DS-SP Operations manual.
Recipe Management Menu
Polish programs (recipes) are stored, retrieved, and deleted at this menu. For
further information refer to the Operator Functions and Machine Setup chapters
of the 6DS-SP Operations manual.
Polish Parameters Menu
Polishing step parameters are entered at this menu. For further information, refer
to the Machine Setup chapter of the 6DS-SP Operations manual.
Sweep Parameters Menu
Parameters that determine how the programmable conditioning arm will sweep
across the table are set at this menu. For further information, refer to the
Machine Setup chapter of the 6DS-SP Operations manual.
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