Strasbaugh Power Distribution
Version 4.0 - February 1998 6 - 7
Opening a service door at any time shuts power down to the entire machine,
including the control computer.
Opening a polish area operator door during an auto polish cycle interrupts
and suspends the cycle.
Opening an elevator area operator door during an auto polish cycle does not
interrupt polishing, but it does suspend elevator movement and robot
movement in the elevator area. Wafer handling will be suspended when an
elevator or robot movement is needed until the door is closed.
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