Strasbaugh Plumbing Description
Version 4.0 -February 1998 7 - 3
PLUMBING DESCRIPTION
COMPRESSED AIR SYSTEM
Refer to engineering drawing 217946P1 for the following discussion of the
pneumatic system. Compressed air is used for:
• linear up/down movement and downward
pressure of the left and right spindles
• the conditioning device
• spindle blow off
• slurry diaphragm pumps
• slurry flush solenoids
• back pressure enabled solenoids
• back pressure system
• shuttle/second table assembly forward and backward movement
• locking of the second table when it is in polish position
• raising/lowering of the load chucks
• raising/lowering of the cleaning devices
• blowing the wafer off the load chuck, carrier, and robot
• air purge to the elevators, robot, and second table
• vacuum valves, providing the air pilot pressure needed to
drive the valve diaphragm back to its de-energized position
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