Strasbaugh Preventive Maintenance Schedules
Version 4.0 - February 1998 8 - 3
PREVENTIVE MAINTENANCE
SCHEDULES
OVERVIEW
This chapter provides maintenance schedules for preventive maintenance of all
systems of the 6DS-SP Planarizer. For procedures listed in the schedules, refer
to the appropriate chapters of the 6DS-SP Operations and Maintenance manuals.
Assumption - The procedures below are discussed with the assumption that the
reader is thoroughly familiar with the 6DS-SP Planarizer. If not, see the chapters
in this manual on Physical Description, Installation, Mechanical Description,
Control System Description, Power Distribution, and Plumbing Description, as
well as the Operator Functions and Machine Setup chapters of the 6DS-SP
Operations manual, before beginning any procedure.
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