Maintenance Model 6DS-SP Planarizer
8 - 12 Version 4.0 - February 1998
28-DAY PREVENTIVE
MAINTENANCE SCHEDULE
SUBJECT ACTION
6) Robot Arm Extension (Radial) and
Travel (Linear) Positions Calibration
(Calibration Variables at Elevators: 103 and
110, 104 and 111, 105 and 112, 106 and 113;
Calibration Variables at Load Stations: 107
and 114, 108 and 115)
7) Robot Up/Down (Z-Axis) Load
Positions Calibration (Calibration
Variables: 130, 131, 132)
8) Robot Vacuum Switch Wafer Sensing
Calibration
9) Testing Elevator and Robot
Calibration Adjustments - Running A Short
Cycle to Observe Wafer Handling
To Next Page
Loading...
