Strasbaugh 6DS-SP - Page 501

Strasbaugh Preventive Maintenance Schedules
Version 4.0 - February 1998 8 - 11
28-DAY PREVENTIVE
MAINTENANCE SCHEDULE
SUBJECT ACTION
• Wafer Handling:
Referring to the “Elevators and Robot--
Order Of Adjustment” list (located in
both the Mechanical Maintenance and
Software Calibration chapters of this
manual), perform the 9 elevator and
robot procedures listed below.
1) Elevator Cassette Platform
Leveling
2) Elevator Cassette Arm Sensor
Switch Adjustments
3) Robot Up/Down (Z-Axis) Top,
Middle, and Bottom Positions
Calibration (Calibration Variables: 116,
117, 118)
4) Elevator Height Positions
Calibration (Calibration Variables: 80,
81, 82, 83)
5) Robot Arm Rotation (Theta)
Positions Calibration (Calibration
Variables: 76, 77, 78, 79)
Check and calibrate each.