Strasbaugh 6DS-SP - Page 500

Maintenance Model 6DS-SP Planarizer
8 - 10 Version 4.0 - February 1998
28-DAY PREVENTIVE
MAINTENANCE SCHEDULE
SUBJECT ACTION
• Shuttle Travel Alignment
• Slurry Diaphragm Pump Pressure
• Slurry 1 Flow, Slurry 2 Flow, Pump 3 (if
installed) Flow
• Spindle Alignment
• Spindle Back Pressure Filters (Left And
Right)
• Spindle Blow Off Pressure
• Spindle Vacuum Chuck Alignment
• Table Alignment
• Table 1
• Table 2/Shuttle
• Table and Spindle RPM
• Wafer Blowoff Pressure
• Wafer Detection Vacuum Sensor
Check and calibrate. Adjust as needed.
Check and adjust.
Check and calibrate flow.
Check and adjust left and right spindle
alignment/runout.
Check; replace as needed.
Check and adjust.
Check and adjust left and right spindle
vacuum chuck alignment/runout.
Check and adjust table alignment/runout.
Check table sweep.
Check:
Load ring tray alignment.
Load chucks for leveling.
Measure RPM of table(s) and left and right
spindle.
Check and adjust.
Check and calibrate.