Strasbaugh Preventive Maintenance Schedules
Version 4.0 - February 1998 8 - 9
28-DAY PREVENTIVE
MAINTENANCE SCHEDULE
SUBJECT ACTION
• Load Station Alignment
• pH Transmitter
• Polish Downforce
• Power On, Machine On Indicator
Lamps
• Robot
• Robot Travel Rails and Leadscrew
• Safety Switches:
Emergency Off Switches
All Safety Interlock Switches Door
Switches
Operator and Polish Doors Interrupts
Check and calibrate. Adjust as needed.
Check and calibrate. Refer to Software
Calibration chapter and Signet
manufacturer’s data.
Check and calibrate polish downforce for both
left and right spindles.
Check for proper operation of Power On and
Machine On indicator lamps. Replace as
needed.
Check:
Robot travel position at elevators and load
stations.
Wafer pickup at send elevators.
Wafer placement and pickup at load stations.
Wafer placement at receive elevators.
Inspect and clean. Lubricate rails with Super
Lube grease or equivalent as needed.
Lubricate leadscrew with Super Lube grease
or equivalent as needed.
Check for proper operation. Adjust as needed.
To Next Page
Loading...
