Maintenance Model 6DS-SP Planarizer
8 - 14 Version 4.0 - February 1998
180-DAY PREVENTIVE
MAINTENANCE SCHEDULE
SUBJECT ACTION
• Bridge
• Clean Dry Air (CDA) or Nitrogen
• Conditioning Device Rotation Gearbox
Oil
• Coolant Flow Transmitter
• D. I. Water
• Elevators
• Leak Detect Sensors
• Polish Table Gearbox Oil
• Resistive Thermal Device (aka.
Thermocouple in previous
documentation)
• Robot
• Slurry System
Check and calibrate bridge position.
Inspect and replace drive belt if needed.
Check flow rate.
Check oil level and fill if required. (Use 9
ozs. AGMA No. 8 or equivalent.)
Check and calibrate. (Refer to Signet
manufacturer’s data.)
Check flow rate.
Check drive belts and replace as needed.
Check and adjust.
Change. (Use 19 pts. AGMA No. 8 or
equivalent.)
Check and calibrate.
Check drive belts; replace as needed.
Check and adjust robot vacuum sensor.
Check and adjust slurry low sensors.
Check and calibrate peristaltic pumps.
Replace peristaltic pump tubes.
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