Strasbaugh 6DS-SP - Page 505

Strasbaugh Preventive Maintenance Schedules
Version 4.0 - February 1998 8 - 15
180-DAY PREVENTIVE
MAINTENANCE SCHEDULE
SUBJECT ACTION
• Spindles
• Spindle Gearbox Oil (Left and Right)
• Table 1
Check and adjust carrier wafer detect sensors.
Check oil level and fill if required. (Use 0.5
pts. AGMA No. 8 or equivalent.)
Check and calibrate drain pan overflow
sensor.