Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 3
Spindles 109
Spindle Alignment 109
Spindle Vacuum Chuck Alignment 114
Spindle Up/Down Limit Switch Adjustments 119
Spindle Vacuum Switch Adjustments 124
Tables 127
Polish Table Removal and Installation 127
Removal 127
Installation 130
Table Alignment 133
Mechanical Maintenance Procedures for the Second
Table Option 137
Removal of Electrical Power for the Second Table at the Terminal Block 138
Measurement of the Present Load Chuck Height Position 139
Removal of the Load Chucks, Table, and Subtable 142
Second Table Load Position Shock Absorber Adjustments 147
Second Table Polish Position Shock Absorber Adjustments 155
Table Travel Cylinder Reed Switch Adjustments 165
Table Locking Cylinder Reed Switch Adjustments 169
Table Unlocking Cylinder Reed Switch Adjustments 172
Reinstallation of the Load Chucks, Table, and Subtable 174
Restoration of Load Chuck Height to the Previously Measured Position 178
Restoration of Electrical Power for the Second Table 180
Performance of Related Software Calibration Procedures 181
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