Maintenance Model 6DS-SP Planarizer
9 - 4 Version 4.0 - February 1998
MECHANICAL MAINTENANCE
PROCEDURES
OVERVIEW
The Mechanical Maintenance Procedures chapter provides step-by-step
procedures for mechanical adjustments of the carriers, cleaning stations,
conditioning arm, elevators, load stations, shuttle, slurry system, spindles, and
table(s).
Assumption - The procedures below were written with the assumption that the
reader is thoroughly familiar with the 6DS-SP Planarizer. If not, see the chapters
in this manual on Physical Description, Installation, Mechanical Description,
Control System Description, Power Distribution, and Plumbing Description, as
well as the Operator Functions and Machine Setup chapters of the 6DS-SP
Operations manual, before beginning any procedure.
LOCKOUT SAFETY PROCEDURE
Refer to “Safety”, located in Chapter One of this manual, for a detailed
procedure for lockout of energy sources that could cause injury to personnel.
WARNING! All energy sources that could cause injury to personnel
must be locked out to protect against accidental or
inadvertent operation when such operation could cause
injury to personnel.
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