Maintenance Model 6DS-SP Planarizer
9 - 6 Version 4.0 - February 1998
RUNNING A SHORT TEST CYCLE
Use the procedure below whenever an adjustment or calibration in this manual
calls for a short test cycle.
To run a cycle to test wafer handling, set the polish times for both spindles to 0.
A. BEFORE YOU BEGIN
Tools Required
• test wafers
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