Maintenance Model 6DS-SP Planarizer
9 - 38 Version 4.0 - February 1998
H. INSTALL WAFER MOUNTING PLATE
Note: Take care to protect the lapped surface.
1. Lay the wafer mounting plate on a table top or workbench positioned
with the large holes up.
2. Place an O-ring in the groove located on the bottom flange.
3. Install alignment studs in the mounting plate:
• Insert a 10-32 stud into each of the three 10-32 threaded holes in the
mounting plate, manually rotating each stud clockwise three or
more revolutions.
4. Turn the mounting plate over, standing it on the three alignment studs.
5. Using a small amount of D. I. (deionized) water, lubricate the
O-ring and the inner ring of the mounting plate.
6. Referring to Figure 9-12, below, install the mounting plate:
POSITIONING
GOAL:
The three alignment studs must be inserted into
the holes of the three jack screws and the wafer
insert positioning holes must be oriented at 11
o’clock and 5 o’clock.
• Place it on the manifold plate, dropping the three alignment studs
into the holes of the three jack screws and orienting the wafer insert
positioning holes as shown.
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