Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 49
6. Remeasure by repeating Step 5., of the Check Current Calibration
section, above.
Repeat remeasuring and readjusting as needed until the preliminary goal
is met.
7. When the preliminary goal has been met, tighten the three 10-32 screws
to 60 inch-pounds of torque.
8. Check for the final goal:
FINAL
GOAL:
For each of the three jack screw assemblies:
• each lock nut must be torqued to 120 inch-pounds,
• each mounting screw must be torqued to 60 inch-
pounds,
• the measurements at the three points must still be
within +/-_.001 in. of equal,
and
• the specified pocket depth is attained.
If the measurements meet the final goal, no further adjustment is
needed.
If not, repeat the adjustment procedure above until the final goal is met.
9. To continue with the carrier assembly procedure sequence, return to
Step 1. of Section H., Install Wafer Mounting Plate, above.
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