Maintenance Model 6DS-SP Planarizer
9 - 48 Version 4.0 - February 1998
3. Using a 7/8-in crowfoot wrench and a 1/2-in. open end wrench, loosen
the locking nuts:
a. Place a 1/2-in. open end wrench on the 1/2-in. square head of one
jack screw.
b. While using the 1/2-in. open end wrench to hold the jack screw
place the 7/8-in crowfoot wrench on the locking nut and rotate the
locking nut counterclockwise to loosen.
c. Remove the crowfoot wrench and the open end wrench from the
jack screw and its locking nut.
d. Repeat Steps a. through c., immediately above, for each of the other
two jack screws.
4. Using a 1/2-in. open end wrench, adjust the jack screw nearest the
lowest point measured as needed to meet the preliminary goal.
Note: Measure with the indicator depth gauge sitting on the wafer
mounting plate and read the height of the retainer ring
during adjustment.
Adjust the remaining two jack screws as needed to meet the goal.
5. Torque each jack screw to 120 inch-pounds:
a. Attach a crowfoot to the torque wrench.
b. Set the torque wrench at 120 inch-pounds.
c. From the underneath side of the manifold plate, place a
1/2-in. open end wrench on the 1/2-in. square head of one jack
screw.
d. While using the 1/2-in. open end wrench to secure the jack screw
place the torque wrench crowfoot on the lock nut and tighten the
nut to 120 inch-pounds of torque (until the wrench clicks).
e. Remove the torque wrench and the open end wrench from the jack
screw and its lock nut.
f. Repeat Steps c. through e., immediately above, for each of the
other two jack screws.
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