Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 63
Close All Access Doors
Turn Machine Power On, Perform Home Sequence Routine, and Place Carriers on
Spindles
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
B. CHECK CURRENT CALIBRATION
1. At Page 1 of the Manual Control Menu, select LT Send Elev Move and
choose Slot 25 to move the elevator to its Slot 25 position.
2. At Page 1 of the Manual Control Menu, select Robot Move and choose
Left Send move the robot to the left send elevator.
3. At Page 1 of the Manual Control Menu, select End Effector On/Off and
choose On to turn robot vacuum ON.
4. Open the elevator access doors, located at the left side of the machine.
5. At Page 1 of the Manual Control Menu, select Robot Arms Move and
choose Left Send to move the robot arms out to position the wafer above
the elevator platform.
6. Place a test wafer on the robot end effector by holding the wafer
underneath and allowing the vacuum to clasp the wafer.
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