Maintenance Model 6DS-SP Planarizer
9 - 62 Version 4.0 - February 1998
Notes:
• Procedures A and B, Robot Leveling and Robot Belt Tensioning, are new
with Update 1/31/96 to the 6DS-SP Maintenance manual.
• As procedures are grouped by component in each chapter, you will need to
move back and forth between the elevator and robot sections to perform the
adjustments in the order required.
• THROUGHPUT OPTION - If the throughput option is installed in your
machine, refer to the Front to Back or Side to Side Throughput Option
Addendum to the 6DS-SP Maintenance manual for the software selections
and maintenance adjustments required for operation.
ELEVATORS AND ROBOT
ELEVATOR CASSETTE PLATFORM
LEVELING
[#1 IN ELEVATORS AND ROBOT ADJUSTMENT SERIES]
LEFT SEND ELEVATOR
A. BEFORE YOU BEGIN
Tools Required
• 5/32-in. hex key
• precision scale (accurate to .03125 in.)
• test wafer
• test cassette
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