Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 61
ELEVATORS AND ROBOT--
ORDER OF ADJUSTMENT
When adjusting the elevators and robot, be sure to follow the order shown below
for performing the mechanical adjustments and software calibration procedures.
Order Procedure
Location In
Maintenance Manual
A Robot Leveling Chapter 9 - Mechanical
Maintenance Procedures
B Robot Belt Tensioning Chapter 9 - Mechanical
Maintenance Procedures
1 Elevator Cassette Platform Leveling Chapter 9 - Mechanical
Maintenance Procedures
2 Elevator Cassette Arm Sensor Switch Adjustments Chapter 9- Mechanical
Maintenance Procedures
3 Robot Up/Down (Z-Axis) Top, Middle, and
Bottom Positions Calibration (Calibration
Variables: 116, 117, 118)
Chapter 10 - Software
Calibration Procedures
4 Elevator Height Positions Calibration (Calibration
Variables: 80, 81, 82, 83)
Chapter 10 - Software
Calibration Procedures
5 Robot Arm Rotation (Theta) Positions Calibration
(Calibration Variables: 76, 77, 78, 79)
Chapter 10 - Software
Calibration Procedures
6 Robot Arm Extension (Radial) and Travel (Linear)
Positions Calibration (Calibration Variables at
Elevators: 103 and 110, 104 and 111, 105 and 112,
106 and 113; Calibration Variables at Load
Stations: 107 and 114, 108 and 115)
Chapter 10 - Software
Calibration Procedures
7 Robot Up/Down (Z-Axis) Load Positions
Calibration (Calibration Variables: 130, 131, 132)
Chapter 10 - Software
Calibration Procedures
8 Robot Vacuum Switch Wafer Sensing Calibration Chapter 10 - Software
Calibration Procedures
9 Testing Elevator and Robot Calibration
Adjustments - Running A Short Cycle to Observe
Wafer Handling
Chapter 10 - Software
Calibration Procedures
To Next Page
Loading...
