Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 65
8. With a precision scale, measure the distance between the elevator
platform and the edge of the wafer.
a. At the left and right sides of the elevator.
GOAL1: The maximum difference between the two measurements
should be less than or equal to .032 in.
GOAL2: All three adjusting screws should be tightened to firm
b. Repeat measurements at front and rear. The goals are the same.
c. If Goal 1 and Goal 2 are met for both left/right and front/rear, no
adjustment is needed. Skip to Section D., When Satisfactory
Adjustment Is Achieved, below.
If not, follow the procedures below to adjust the alignment.
C. ALIGNMENT PROCEDURE
GOAL 1
Front to Rear
1. While holding one hand under the elevator support platform to provide
support, use a 5/32-in. hex key to loosen the three
10-32 socket head adjusting screws by rotating them counterclockwise.
2. While continuing to support the platform with one hand, tighten all three
adjusting screws until just snug by rotating them clockwise.
3. Referring to Figure 9-14, tighten adjusting screw B 1/8 turn farther.
4. Adjust screw A and screw B as needed to meet the goal:
• To lower the end of the platform nearest the robot, rotate screw A
clockwise.
• To raise the end of the platform nearest the robot, rotate screw A
counterclockwise.
Note: If the goal cannot be met by adjusting screw A, screw B
may have to be adjusted another 1/8 turn clockwise or as
needed.
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