Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 67
D. WHEN SATISFACTORY ADJUSTMENT IS ACHIEVED
1. At Page 1 of the Manual Control Menu, select Robot Arms Move and
choose Zero to move the robot arms back to their
“Zero” (home position) over the robot carriage.
2. Following the Procedure For Safe Removal Of Wafer From Robot,
located in the Operator Functions chapter of the 6DS-SP Operations
manual, remove the wafer.
3. Rehome the machine.
RIGHT SEND ELEVATOR
Repeat as for Left Send Elevator, substituting right send elevator for left send
elevator where appropriate.
LEFT RECEIVE ELEVATOR
Repeat as for Left Send Elevator, substituting left receive elevator for left send
elevator where appropriate.
RIGHT RECEIVE ELEVATOR
Repeat as for Left Send Elevator, substituting right receive elevator for left send
elevator where appropriate.
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