Maintenance Model 6DS-SP Planarizer
9 - 114 Version 4.0 - February 1998
SPINDLE VACUUM CHUCK
ALIGNMENT
Notes:
The procedure below is written for the right spindle vacuum chuck. Repeat for
the left spindle, making appropriate substitutions.
A. BEFORE YOU BEGIN
Tools Required
• dial indicator accurate to 1/1000 in. and magnetic base
• clamp
• 1/2-in. open end wrench
• 1/4-in. hex key
• 5/32-in. hex key
• feeler gauge
• four .060-in. stainless steel shims or four feeler gauges
• mild solvent and soft cloth
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