Maintenance Model 6DS-SP Planarizer
9 - 130 Version 4.0 - February 1998
INSTALLATION
NOTICE: The procedure below is a two-person job!
A. BEFORE YOU BEGIN
Tools Required
• 3/4-in. open end wrench
• 3/4 in. box end wrench
• 1/2-13 NC eye bolt
• Strasbaugh table hoist crane
• adjustable-height movable cart
• channel lock pliers
• adjustable wrench
• torque wrench
• small mirror (approx. 3 in. x 5 in.)
Machine Preparation
1. Turn machine power on and perform home sequence routine.
2. Remove the white plastic splash ring.
3. Open/remove the Lower Right Front Service Door.
4. Turn the machine power to OFF by pressing the red <EMERG OFF>
button, located on the control panel.
5. Open the Right Side Operator Door.