Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 181
PERFORMANCE OF RELATED SOFTWARE
CALIBRATION PROCEDURES
After completing the second table mechanical adjustments and before running an
auto polish cycle, perform the software calibration adjustments listed below by
following the procedures found in the Software Calibration chapter of this
manual.
Note: Be sure to follow the Elevators and Robot--Order of Adjustment,
located in the Elevators section of both this chapter and the Software
Calibration chapter of this manual.
• Bridge Table 2 Position Calibration
• Robot Arm Extension (Radial) and Travel (Linear) Positions
Calibration at Load Stations (Calibration Variables: 107 and 114, 108
and 115)
• Robot Up/Down (Z-Axis) Load Positions Calibration (Calibration
Variables: 130, 131, 132)
To Next Page
Loading...
