Operations Model 6DS-SP Planarizer
2 - 10 Version 4.0 - February 1998
Figure 2-3 Planarizer Right Side View
13 Right Side Polish Section Operator Door (side view)
14 Operator Door Latch Assembly
15 Lower Right Front Service Door (side view)
16 Right Top Service Door
17 Lower Right Side Service Door
18 Left Side Electrical Cabinet (side view)
The Lower Right Side Service Door (17), when removed, permits access to
the bridge drive train, polish table drive, the conditioning brush assembly,
and several drain and exhaust hoses. The Right Top Service Door (16)
provides access to the slurry pumps and the bridge assembly lubrication
reservoir.
To Next Page
