Strasbaugh Machine Description
Version 4.0 - February 1998 2 - 9
Figure 2-2 Planarizer Left Side View
8 Left Side Polish Section Operator Door (side view)
9 Optional Fixed Remote Monitor And Control Panel
10 Lower Left Front Service Door (side view)
11 Left Side Service Door
12 Right Side Electrical Cabinet (side view)
13 Elevator Access Doors
The Left Side Service Door (11) provides access to the front and side regulator
and valve assembly panels. The regulator panels hold the regulators for
adjusting the chuck and spindle blow off for left and right wafer carrier
positions, load chuck raise pressure, and wafer blow off pressure as well as other
functions.
Note: Wafer blow off pressure is used without a regulator on machines
equipped with back pressure.
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