Strasbaugh 6DS-SP - Page 692

Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 1
10
Software
Calibration
Procedures
• MENUS USED IN MECHANICAL
ADJUSTMENTS AND SOFTWARE
CALIBRATION PROCEDURES
• BRIDGE
• CLEANING STATIONS
• CONDITIONING ARM
• ELEVATORS
• LOAD STATIONS
• ROBOT
• SLURRY SYSTEM
• SPINDLES
• TABLES