Maintenance Model 6DS-SP Planarizer
10 - 2 Version 4.0 - February 1998
OVERVIEW 4
Running a Short Test Cycle 4
Formulas Used in Software Calibration Procedures 5
ORDER OF ADJUSTMENT 6
MENUS USED IN MECHANICAL ADJUSTMENTS AND SOFTWARE
CALIBRATION PROCEDURES 7
Manual Control Menu (Screen Page 1) 11
Manual Control Menu (Screen Page 2) 15
Manual Control Menu (Screen Page 3) 18
Diagnostics Menu 21
Calibration/Configuration Menu 24
BRIDGE 26
Bridge Home Position Calibration 26
Bridge Load Position Calibration 31
Bridge Left/Right Curtain Position Calibration 34
Bridge Table 2 Position Calibration 37
CLEANING STATIONS 41
Cleaning Stations Adjustment Series--Order of Adjustment 41
Enhanced Cleaning Station Rotational Speed (Potentiometer) Calibration
[#3 in Cleaning Stations Adjustment Series] 42
CONDITIONING ARM 44
Conditioning Arm Adjustment Series--Order of Adjustment 44
Programmable Arm Calibration
[#4 in Conditioning Arm Adjustment Series] 45
Controllable Conditioning Down Force Option Calibration
[#5 in Conditioning Arm Adjustment Series] 49
ELEVATORS AND ROBOT--ORDER OF ADJUSTMENT 57
ELEVATORS 59
Elevator Height Calibration
[#4 in Elevators and Robot Adjustment Series] 59
Universal Wafer Cassette Support 67
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