Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 59
ELEVATORS
Be sure to complete the Robot Height (Z-Axis) Calibrations at the Top, Middle,
and Bottom Positions (refer to the Robot section, below in this chapter)
BEFORE beginning the Elevator Height Calibration.
ELEVATOR HEIGHT CALIBRATION
[#4 IN ELEVATORS AND ROBOT ADJUSTMENT SERIES]
This adjustment checks the wafer position in the cassette slot and corrects the
elevator offset slot value for each of the four elevators.
IMPORTANT: The elevator height adjustments must be completed
in the order presented below.
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