Strasbaugh 6DS-SP - Page 749

Maintenance Model 6DS-SP Planarizer
10 - 58 Version 4.0 - February 1998
Order Procedure
Location In
Maintenance Manual
A Robot Leveling Chapter 9 - Mechanical
Maintenance Procedures
B Robot Belt Tensioning Chapter 9 - Mechanical
Maintenance Procedures
1 Elevator Cassette Platform Leveling Chapter 9 - Mechanical
Maintenance Procedures
2 Elevator Cassette Arm Sensor Switch Adjustments Chapter 9- Mechanical
Maintenance Procedures
3 Robot Up/Down (Z-Axis) Top, Middle, and
Bottom Positions Calibration (Calibration
Variables: 116, 117, 118)
Chapter 10 - Software
Calibration Procedures
4 Elevator Height Positions Calibration (Calibration
Variables: 80, 81, 82, 83)
Chapter 10 - Software
Calibration Procedures
5 Robot Arm Rotation (Theta) Positions Calibration
(Calibration Variables: 76, 77, 78, 79)
Chapter 10 - Software
Calibration Procedures
6 Robot Arm Extension (Radial) and Travel (Linear)
Positions Calibration (Calibration Variables at
Elevators: 103 and 110, 104 and 111, 105 and 112,
106 and 113; Calibration Variables at Load
Stations: 107 and 114, 108 and 115)
Chapter 10 - Software
Calibration Procedures
7 Robot Up/Down (Z-Axis) Load Positions
Calibration (Calibration Variables: 130, 131, 132)
Chapter 10 - Software
Calibration Procedures
8 Robot Vacuum Switch Wafer Sensing Calibration Chapter 10 - Software
Calibration Procedures
9 Testing Elevator and Robot Calibration
Adjustments - Running a Short Cycle to Observe
Wafer Handling
Chapter 10 - Software
Calibration Procedures
Note:
Procedures A and B, Robot Leveling and Robot Belt Tensioning, are new with
Update 1/31/96 to the 6DS-SP Maintenance manual.