Maintenance Model 6DS-SP Planarizer
10 - 60 Version 4.0 - February 1998
CALIBRATION VARIABLES SET DURING THIS PROCEDURE
80 Left send offset to slot 0
• Nominal value for pre-3/95
elevators: 2 to 3 in.
• Nominal value for post-3/95
elevators: 1 to 2 in.
The distance, in inches, required to raise the left
send elevator from the home position to a point
that places an imaginary "slot 0" at the wafer
loading plane.
81 Right send offset to slot 0
• Nominal value for pre-3/95
elevators: 2 to 3 in.
• Nominal value for post-3/95
elevators: 1 to 2 in.
The distance, in inches, required to raise the right
send elevator from the home position to a point
that places an imaginary "slot 0" at the wafer
loading plane.
82 Left recv offset to slot 0
• Nominal value for pre-3/95
elevators: 2 to 3 in.
• Nominal value for post-3/95
elevators: 1 to 2 in.
The distance, in inches, required to raise the left
receive elevator from the home position to a point
that places an imaginary "slot 0" at the wafer
loading plane.
83 Right recv offset to slot 0
• Nominal value for pre-3/95
elevators: 2 to 3 in.
• Nominal value for post-3/95
elevators: 1 to 2 in.
The distance, in inches, required to raise the right
receive elevator from the home position to a point
that places an imaginary "slot 0" at the wafer
loading plane.
A. BEFORE YOU BEGIN
Tools Required
• precision scale (accurate to .03125 in.)
• test wafer
• test cassette
Turn Machine Power On and Perform Home Sequence Routine
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
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