Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 61
LEFT SEND ELEVATOR
ROUGH HEIGHT ADJUSTMENT
B. Check and Adjust the Current Calibration
1. Place a test wafer in the top slot of a wafer cassette.
(Receive Elevators: bottom slot)
2. Place the cassette on the left send elevator.
3. Lower the elevator cassette sensor arm to the top of the cassette.
4. At Page 1 of the Manual Control Menu, select Left Send Elev Move and
choose Slot 1 to move the left send elevator to slot 1.
(Receive Elevators: Choose Slot 25.)
5. Select Robot Move and choose Left Send to move the robot to the left
send elevator.
6. Select Robot Up/Dn Move and choose Top to move the robot Z-axis to
its top position.
7. Open the Elevator Access Doors.
Note: Opening the elevator doors removes holding torque from the
elevators and robot, permitting manual manipulation of the
robot arm to ensure proper clearance.
8. Manually extend the robot arm into the cassette.
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