Strasbaugh 6DS-SP - Page 753

Maintenance Model 6DS-SP Planarizer
10 - 62 Version 4.0 - February 1998
9. Measure the actual distance from the top of the wafer to the bottom of
the robot arm and note whether the arm sits above or below the wafer.
Note: This measurement must be accurate to
.0625 in. (1/16 in.).
GOAL FOR CASSETTE
SLOT SPACING OF
.25 INCHES AND
GREATER:
• The Actual Distance must equal .125 in.
(1/8 in.).
and
• the arm must be positioned above the
wafer.
GOAL FOR CASSETTE
SLOT SPACING OF
LESS THAN .1875 INCHES
• The Actual Distance must equal .096 in.
and
• the arm must be positioned above the
wafer.
a. Record the measurement and robot arm position (above wafer or
below wafer):
Example: Actual Distance = .25 in. (1/4 in.)
Position = above wafer
b. If the goal is met, no rough adjustment is necessary. Skip to the
Fine Height Adjustment procedure, below.
c. If the goal is not met, make the needed adjustment by following
Step 10., immediately below.
10. Manually retract the robot arm to its home position over the robot
carriage.
11. Close the Elevator doors.
12. At Page 1 of the Manual Control Menu, select Robot Arms Move and
choose Zero.