Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 63
13. At the Calibration/Configuration Menu increase/decrease the value of
variable 80, Left send offset to slot 0, as needed to meet the goal:
Note: Changing the value of variable 80 while the elevator is in its
Slot 1 position via the Manual Control Menu automatically
repositions the elevator to the new location.
a. Increase/decrease the variable value as needed.
b. Remeasure to evaluate the elevator position, and readjust the value
if needed.
c. Repeat checking and adjusting until the goal has been met.
d. When the goal has been met, go on to the Fine Height Adjustment,
below.
FINE HEIGHT ADJUSTMENT
C. Check and Adjust the Current Calibration
1. At Page 1 of the Manual Control Menu, select End Effector On/Off and
choose On to turn robot end effector vacuum "on".
2. Hold a test wafer under the end effector vacuum chuck until it takes
vacuum.
3. Select Robot Up/Dn Move and choose Bottom to move the robot Z-axis
to its bottom position.
4. Select Robot Up/Dn Move and choose Middle to move the robot Z-axis
to its middle position.
Note: The robot should now have moved to its middle position while
holding the wafer.
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