Maintenance Model 6DS-SP Planarizer
10 - 64 Version 4.0 - February 1998
5. Check the wafer’s position in the slot.
GOAL FOR SEND
ELEVATORS:
The wafer should be centered vertically in the slot,
positioned at or slightly BELOW the center of the
slot, with no part touching the bottom of the slot.
GOAL FOR
RECEIVE
ELEVATORS:
The wafer should be centered vertically in the
slot, positioned at or slightly ABOVE the center
of the slot, with no part touching the bottom of
the slot.
a. Check visually, examining the position of the wafer’s edges.
b. If the wafer position meets the goal, skip to the Right Send Elevator
adjustments.
c. If the wafer position does not meet the goal, go to Step 6.,
immediately below, to make corrections.
6. At the Calibration/Configuration Menu increase/decrease the value of
variable 80, Left send offset to slot 0, in .015-in. increments as needed
to meet the goal:
Note: Changing the value of variable 80 while the elevator is in its
Slot 1 position via the Manual Control Menu automatically
repositions the elevator to the new location.
a. Increase/decrease the variable value in .015-in. increments as
needed.
b. Reevaluate the elevator position, and readjust the variable value if
needed.
c. Repeat checking and adjusting until the goal has been met.
d. When the goal has been met, go on to the Right Send Elevator
(below).
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