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Strasbaugh 6DS-SP - Page 697

Strasbaugh 6DS-SP
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Maintenance Model 6DS-SP Planarizer
10 - 6 Version 4.0 - February 1998
ORDER OF ADJUSTMENT
Unless otherwise specifically stated in a procedure, when adjusting a component,
always perform any mechanical and pneumatic adjustment(s) before beginning
the software calibration procedures for the component.
Refer to Maintenance Chapter 9, Mechanical Maintenance Procedures, for
mechanical adjustment procedures.
Refer to Maintenance Chapter 11, Pneumatic Adjustments, for pneumatic
adjustment procedures.
Refer to Maintenance Chapter 10, Software Calibration Procedures, for
software calibration procedures.
EXCEPTIONS
For the components shown below, refer to the “Order of Adjustmentslocated at
the beginning of the appropriate component section for a detailed listing of the
order in which the mechanical, pneumatic, and software calibration adjustments
must be performed.
Elevator and Robot Adjustments
Cleaning Stations
Conditioning Arm

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