Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 11
MANUAL CONTROL MENU
The three pages of the Manual Control Menu and the choices available at each
are addressed in the subsections below.
MANUAL CONTROL MENU (SCREEN PAGE 1)
This menu/page permits manual manipulation of every system involved with
wafer handling. If an illegal choice is made, a warning will show. If any choice
is made, Stat: (status) will change to Manual Mode.
If the entry area shows a dashed line, then a choice has not yet been made. If an
entry area shows a choice, then that choice will be continuously asserted (with
the exception of elevators). For example, if the bridge was commanded to move
to the load position but is stopped because the polish door is opened, the bridge
will continue on to the load station when the door is closed.
The status of any item having either servo position checks or physical switches is
shown to the right of the selection area.
If the machine is idle, it is possible to move elevators that are "active" to
positions which are different from those at the end of the last polish cycle. This
can sometimes be useful for error recovery or to advance a send elevator past
many empty slots. However, it is possible to move elevators to positions at
which the robot arm can strike a wafer on the next cycle -- THEREFORE,
USE CAUTION! (For maximum safety at the "operator" password level,
attempting to move an elevator will make it "inactive", and the Auto Cycle will
no longer use the elevator until it is reset by raising its arm.)
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