Maintenance Model 6DS-SP Planarizer
10 - 10 Version 4.0 - February 1998
"LEVER TYPE" CONDITIONING ARM SUPPORT:
A "lever type" conditioning arm is supported in addition to the original
non-programmable arm (with SCR control) and programmable "lift" type arm.
Calibration variable 124 now shows all three choices. Variables 150 through 155
are used for lever arm calibration.
UNIVERSAL CASSETTE SUPPORT:
This feature permits the software to be adjusted to use cassettes with any number
of slots and any slot spacing (within the mechanical move limits of the
elevators).
Refer to Universal Cassette Support in the Elevators section of this chapter for
details on this feature.
SCRUBBER SUPPORT:
This feature supports a scrubber station at the right receive position which can
pass wafers to a wafer scrubber. The 6DS-SP communicates with the scrubber
using six handshake signals connected to 6DS-SP digital inputs and outputs.
The 6DS-SP outputs are buffered with relays.
Several alarm conditions are supported and displayed. If the scrubber becomes
unavailable, the 6DS-SP will direct polished wafers to the receive cassette.
SLURRY ALARM ACTION CHOICE:
Calibration variable 59 "Slry alrm action (0-no, l-yes)" permits assignment of
certain actions to the presence of an alarm indicating low or absent slurry.
If set to "0", slurry alarms will display as information only.
If set to " 1 ", cycle starting will be inhibited if any polish step requires a slurry
that has an alarm. If already in an auto cycle, a "finish cycle" will be
automatically set if such an alarm occurs. Finally, if not in a cycle, the alarm
will still display as information only.
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