Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 9
EASY PROGRAMMABLE ARM CALIBRATION AND SETUP:
The optional programmable conditioning arm calibration and parameter setup is
used only to establish a park and table center position. The Conditioning
Parameters Menu has choices that define the sweep endpoints in terms of inches
from the table center.
Calibration:
Calibration Variable 125 "Prog cond park position" is used to set the Park
Position of the arm.
Calibration Variable 126 "Prog cond tbl center position" is used to set the arm to
the exact table center. This should be a point at which the center of the arm
divides the table exactly.
Calibration steps:
1. In the Sweep Parameters Menu, set the Inner position to 7 inches (a medium
position).
2. In the Manual Control Menu, raise the arm and move it to the Inner position.
(This will cause the arm to move to the variable 126 position.)
3. Change to the Calibration/Configuration Menu and change the variable 126
value until the center of the conditioning device is exactly 7 inches from the
table center.
Sweep Parameters Setup:
Determine the endpoints of the desired arm sweep in terms of the distance in
inches from the table center to the center of the conditioning device. This will
probably involve wafer diameter, oscillation stroke, and conditioning device
diameter.
In the Sweep Parameters Menu, enter these endpoints as the Outer and Inner
values. The Outer value must be the larger of the two values.
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