Maintenance Model 6DS-SP Planarizer
10 - 8 Version 4.0 - February 1998
6. Change the calibration variables for elevator offset, robot position, and arm
position as required until alignment is achieved. (Unreasonable values will
be ignored, and a warning will show.)
The servo systems will immediately respond to the calibration changes you
make.
MANUAL CONTROL MENU:
The Manual Control Menu supports every servo move used by the machine
including elevator stepping. In addition, this menu supports virtually everything
required for machine calibration (for example, backpressure, end effector
vacuum, and load chuck raising and lowering).
Also, once a servo move has been requested, it will be repeatedly asserted until
changed or otherwise canceled, permitting easy servo calibration.
OPTIONAL OPERATOR ACCESS TO POLISH TIME AND
BACKPRESSURE POLISH PARAMETERS:
Calibration Variable 99 "Oper access(0-no, l-T, 2-T&BP)” can be used to permit
access to certain polish parameters even if the Operator password level is set.
The choices are: 0- No access to any polish parameters
1- Access to polish times only
2- Access to polish times and backpressure values
If any access is permitted, any change will cause the Rec (recipe) area of the
screen to indicate MOD (modified).
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