Strasbaugh 6DS-SP - Page 711

Maintenance Model 6DS-SP Planarizer
10 - 20 Version 4.0 - February 1998
FUNCTION KEY CHOICES AVAILABLE AT PAGE 3 OF THE
MANUAL CONTROL MENU
Key Label Function(s)
Slurry l Flow
Runs the Slurry 1 pump at the selected flow
rate (in ML/MIN).
Slurry 2 Flow
Runs the Slurry 2 pump at the selected flow
rate (in ML/MIN).
Pump 3 Flow
Runs the optional pump 3 at the selected flow
rate (in ML/MIN).
Table l Rinse On/Off
Turns the primary table DI water rinse on and
off.
Table 2 Rinse On/Off
Turns the optional second table DI water rinse
on and off.
Left Backpressure Enable
Right Backpressure Enable
Enables the backpressure systems.
Disabling causes venting to the atmosphere.
Left Backpressure
Right Backpressure
Sets the backpressure value.