Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 77
HOW THE ROBOT’S UP/DOWN MOTION IS USED AT THE
ELEVATORS
At the Send Elevators - The robot up/down movements at the send elevators
permit the robot to extend its arm into a cassette slot slightly above the waiting
wafer (top position), move down to the wafer (bottom position), turn vacuum on
to pick up the wafer, and move up slightly (middle position) before retracting
out of the slot.
At the Receive Elevators - The robot up/down movements at the receive
elevators permit the robot to extend its arm while holding a wafer into the middle
of a cassette slot (middle position), turn vacuum off to release the wafer, and
move up slightly above the wafer (top position) before retracting out of the slot.
The bottom position is not used at the receive elevators.
Setting Goals for Cassettes with Slot Spacing Other than Those Listed Above and
Processing of Other Wafer Sizes
Check the cassette slot spacing and make appropriate adjustments in the values
for variables 116, 117, and 118 based upon the desired relationships between the
three positions as shown in the two tables above.
A. BEFORE YOU BEGIN
Tools Required
• none
Turn Machine Power On and Perform Home Sequence Routine
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
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