Maintenance Model 6DS-SP Planarizer
10 - 76 Version 4.0 - February 1998
CALIBRATION VARIABLES SET DURING THIS PROCEDURE
116 Robot up/dn top position
• Nominal value for RTZ Robot and 3-, 4-, 5-, 6-, or
8-inch wafers: .5 in.
• Nominal value for two arm robot and 8-inch
wafers (.25-in. slot spacing): between .2 and .5 in.
• Nominal value for two arm robot and 3-, 4-, 5-, or
6-inch wafers (.1875-in. slot spacing): between .2
and .5 in.
Value, in inches, to move the
robot's up/down axis to a
position below the home
position that is slightly above
wafers in a cassette.
117 Robot up/dn middle position
• Nominal value for RTZ Robot and 3-, 4-, 5-, 6-, or
8-inch wafers: .56 in.
• Nominal value for two arm robot and 8-inch
wafers (.25-in. slot spacing): .11 in. greater than
the value of variable 116
• Nominal value for two arm robot and 3-, 4-, 5-, or
6-inch wafers (.1875-in. slot spacing): .04 in.
greater than the value of variable 116
Value, in inches, to move the
robot's up/down axis to a
position below the home
position that will hold a wafer
in the center of the slot in a
cassette.
118 Robot up/dn bottom position
• Nominal value for RTZ Robot and
3-, 4-, 5-, 6-, or 8-inch wafers: .62 in. to .64 in.
• Nominal value for two arm robot and 8-inch
wafers (.25-in. slot spacing): .19 in. greater than
the value of variable 116
• Nominal value for two arm robot and 3-, 4-, 5-, or
6-inch (.1875-in. slot spacing) wafers: .1 in. greater
than the value of variable 116
Value, in inches, to move the
robot's up/down axis to a
position below the home
position that will contact a
wafer resting at the bottom of a
slot in a cassette.
Note: .62 is used without
dunk/send mode; when in
dunk/send mode, approx. .64 is
used.
Setting Goals for Cassettes with Slot Spacing Other than Those Listed Above and
Processing of Other Wafer Sizes
Check the cassette slot spacing and make appropriate adjustments in the values
for variables 116, 117, and 118 based upon the desired relationships between the
three positions as shown in the two tables above.
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